ION-SCATTERING AND SURFACE RECOILING FROM A SI SURFACE BY LOW-ENERGY NE+ BOMBARDMENT

被引：7
|
作者：
MURAKAMI, J
HASHIMOTO, T
KUSUNOKI, I
机构：
[1] Research Institute for Scientific Measurements, Tohoku University, 980, 2-1-1 Katahira, Sendai, Japan
来源：
VACUUM | 1990年 / 41卷 / 1-3期
关键词：
D O I：
10.1016/0042-207X(90)90361-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Surface recoiling and ion scattering from a water and/or oxygen covered Si(001) surface were studied by a Time-of-Flight (TOF) technique for low energy Ne+ beam bombardment. The TOF spectra were measured for the sample at various elevated temperatures, from which it is suggested that the technique is useful to study solid surfaces at high temperatures. It was found that the positively charged fraction of recoiled oxygen atoms is dependent on the amount of surface oxygen atoms and increases with it. © 1990 Pergamon Press plc.
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收藏
页码：369 / 371
页数：3
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