DIGITAL PROCESSING OF BEAM SIGNALS IN A VARIABLY SHAPED ELECTRON-BEAM LITHOGRAPHY SYSTEM

被引：0

作者：

MATSUOKA, G ^{[1
]}

YOKOUCHI, H ^{[1
]}

OKUMURA, M ^{[1
]}

MATSUZAKA, T ^{[1
]}

SAITOU, N ^{[1
]}

NAKAMURA, K ^{[1
]}

机构：

[1] HITACHI LTD,NAKA WORKS,KATSUTA,IBARAKI 312,JAPAN

来源：

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1985年 / 537卷

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：34 / 41

页数：8

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