CHEMICAL VAPOR-DEPOSITION OF COGA AND PTGA2 THIN-FILMS FROM MIXED-METALORGANOMETALLIC COMPOUNDS

被引：43

作者：

CHEN, YJ

KAESZ, HD

KIM, YK

MULLER, HJ

WILLIAMS, RS

XUE, ZL

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 26期

关键词：

D O I：

10.1063/1.102370

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2760 / 2762

页数：3

共 19 条

[1] SURFACE STOICHIOMETRY AND STRUCTURE OF GAAS [J].

ARTHUR, JR .

SURFACE SCIENCE, 1974, 43 (02) :449-461

[2]

CHEN YJ, 1988, APPL PHYS LETT, V53, P1592

[3] CHEMICAL VAPOR-DEPOSITION OF FECOX AND FECOXOY THIN-FILMS FROM FE-CO CARBONYL CLUSTERS [J].

CZEKAJ, CL ;

GEOFFROY, GL .

INORGANIC CHEMISTRY, 1988, 27 (01) :8-10

[4] COBALT-GALLIUM AND NICKEL-GALLIUM BINARY-SYSTEMS - COMPARATIVE-STUDY [J].

FESCHOTTE, P ;

EGGIMANN, P .

JOURNAL OF THE LESS-COMMON METALS, 1979, 63 (01) :15-30

[5] KINETICS OF THE HYDROGENATION OF CO OVER A SINGLE-CRYSTAL NICKEL-CATALYST [J].

GOODMAN, DW ;

KELLEY, RD ;

MADEY, TE ;

YATES, JT .

JOURNAL OF CATALYSIS, 1980, 63 (01) :226-234

[6] TAILORED-ORGANOMETALLICS AS PRECURSORS FOR THE CHEMICAL VAPOR-DEPOSITION OF HIGH-PURITY PALLADIUM AND PLATINUM THIN-FILMS [J].

GOZUM, JE ;

POLLINA, DM ;

JENSEN, JA ;

GIROLAMI, GS .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1988, 110 (08) :2688-2689

[7] BINARY-SYSTEMS, PLATINUM-ALUMINUM, PLATINUM-GALLIUM AND PLATINUM-INDIUM [J].

GUEX, P ;

FESCHOTTE, P .

JOURNAL OF THE LESS-COMMON METALS, 1976, 46 (01) :101-116

[8]

KAESZ HD, 1989, MATERIALS RES SOC S, V131, P395

[9] BIS(DIMETHYLMETALL(III)GLYOXIMATO)METALLATE(II) (METALL(III) = AL, GA, IN, METALL(II) = NI, PD, PT, CU) [J].

KOHLER, U ;

HAUSEN, HD ;

WEIDLEIN, J .

JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1984, 272 (03) :337-350

[10]

PALMSTROM CJ, IN PRESS MATER RES S, P144

← 1 2 →