EROSION OF CORNERS AND EDGES ON AN ION-BOMBARDED SILICON SURFACE

被引：16
|
作者：
SMITH, R [1 ]
TAGG, MA [1 ]
CARTER, G [1 ]
NOBES, MJ [1 ]
机构：
[1] UNIV SALFORD,SALFORD M5 4WT,LANCS,ENGLAND
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1986年 / 5卷 / 01期
关键词：
D O I：
10.1007/BF01671459
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：115 / 120
页数：6
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