CHARACTERISTICS OF RADIOFREQUENCY SILICON-CARBIDE FILMS

[1] SILICON CARBIDE CONTAMINATION OF EPITAXIAL SILICON GROWN BY PYROLYSIS OF TETRAMETHYL SILANE [J]. JOURNAL OF CRYSTAL GROWTH, 1971, 9 (01) : 127 - &

[2] RADICAL MOLECULE AND ION-MOLECULE MECHANISMS IN THE POLYMERIZATION OF HYDROCARBONS AND CHLOROSILANES IN RF PLASMAS AT LOW-PRESSURES (BELOW 1.0 TORR) [J]. THIN SOLID FILMS, 1984, 118 (02) : 231 - 241

[3] EFFECT OF FISSION-FRAGMENT IRRADIATION UPON OXIDATION OF SILICON CARBIDE BY OXYGEN AT 950 DEGREES C [J]. JOURNAL OF NUCLEAR MATERIALS, 1971, 39 (03) : 253 - &

[4] BEUTLER H, 1975, 5TH P INT C CHEM VAP, P749

[5] CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE AND ITS APPLICATIONS [J]. THIN SOLID FILMS, 1985, 126 (3-4) : 313 - 318

[6] FABRICATION OF CERAMIC-COATED CARBON-FIBER DUPLEX ELEMENTS [J]. JOURNAL OF MATERIALS SCIENCE, 1974, 9 (12) : 1933 - 1948

[7] STRUCTURE OF CHEMICAL VAPOR-DEPOSITED SILICON-CARBIDE [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 57 - 72

[8] PARAMETRIC STUDY OF SILICON-CARBIDE COATINGS DEPOSITED IN A FLUIDIZED-BED [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 89 - 96

[9] SIC COATINGS FOR 1ST-WALL CANDIDATE MATERIALS BY RF SPUTTERING [J]. THIN SOLID FILMS, 1979, 63 (02) : 237 - 242

[10] CHARACTERIZATION OF PYROLYTIC CARBON DEPOSITED ON GRAPHITE SUBSTRATES IN INDUCTIVE RF-PLASMAS OF PROPYLENE AND ARGON [J]. THIN SOLID FILMS, 1980, 72 (01) : 195 - 200

[1] SILICON CARBIDE CONTAMINATION OF EPITAXIAL SILICON GROWN BY PYROLYSIS OF TETRAMETHYL SILANE [J]. JOURNAL OF CRYSTAL GROWTH, 1971, 9 (01) : 127 - &

[2] RADICAL MOLECULE AND ION-MOLECULE MECHANISMS IN THE POLYMERIZATION OF HYDROCARBONS AND CHLOROSILANES IN RF PLASMAS AT LOW-PRESSURES (BELOW 1.0 TORR) [J]. THIN SOLID FILMS, 1984, 118 (02) : 231 - 241

[3] EFFECT OF FISSION-FRAGMENT IRRADIATION UPON OXIDATION OF SILICON CARBIDE BY OXYGEN AT 950 DEGREES C [J]. JOURNAL OF NUCLEAR MATERIALS, 1971, 39 (03) : 253 - &

[4] BEUTLER H, 1975, 5TH P INT C CHEM VAP, P749

[5] CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE AND ITS APPLICATIONS [J]. THIN SOLID FILMS, 1985, 126 (3-4) : 313 - 318

[6] FABRICATION OF CERAMIC-COATED CARBON-FIBER DUPLEX ELEMENTS [J]. JOURNAL OF MATERIALS SCIENCE, 1974, 9 (12) : 1933 - 1948

[7] STRUCTURE OF CHEMICAL VAPOR-DEPOSITED SILICON-CARBIDE [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 57 - 72

[8] PARAMETRIC STUDY OF SILICON-CARBIDE COATINGS DEPOSITED IN A FLUIDIZED-BED [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 89 - 96

[9] SIC COATINGS FOR 1ST-WALL CANDIDATE MATERIALS BY RF SPUTTERING [J]. THIN SOLID FILMS, 1979, 63 (02) : 237 - 242

[10] CHARACTERIZATION OF PYROLYTIC CARBON DEPOSITED ON GRAPHITE SUBSTRATES IN INDUCTIVE RF-PLASMAS OF PROPYLENE AND ARGON [J]. THIN SOLID FILMS, 1980, 72 (01) : 195 - 200