ELECTRICAL TRANSPORT-PROPERTIES OF TRANSITION-METAL DISILICIDE FILMS

被引:66
作者
NAVA, F
TU, KN
MAZZEGA, E
MICHELINI, M
QUEIROLO, G
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
[2] SGS MICROELECT,I-20041 AGRATE,ITALY
关键词
D O I
10.1063/1.338203
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1085 / 1093
页数:9
相关论文
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