PRECISION-MEASUREMENT OF THE SURFACE-ACOUSTIC-WAVE VELOCITY ON SILICON SINGLE-CRYSTALS USING OPTICAL-EXCITATION AND DETECTION

被引：38

作者：

COUFAL, H ^{[1
]}

MEYER, K ^{[1
]}

GRYGIER, RK ^{[1
]}

HESS, P ^{[1
]}

NEUBRAND, A ^{[1
]}

机构：

[1] UNIV HEIDELBERG, INST PHYS CHEM, W-6900 HEIDELBERG, GERMANY

来源：

JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA | 1994年 / 95卷 / 02期

关键词：

D O I：

10.1121/1.408473

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Surface acoustic wave (SAW) and pseudo surface acoustic wave (PSAW) pulses were excited on the (001) and (111) planes of silicon single crystals using ps laser pulses of 248-nm wavelength. An optical beam deflection technique with a bandwidth of 600 MHz was developed for the detection of SAW with high spatial resolution. With this technique the SAW velocities on these silicon planes were determined with an accuracy of 0.1% in various directions of propagation.

引用

页码：1158 / 1160

页数：3

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