ION-IMPLANTATION AND ION ASSISTED COATING OF METALS

被引：21
|
作者：
DEARNALEY, G
GOODE, PD
MINTER, FJ
PEACOCK, AT
HUGHES, W
PROCTOR, GW
机构：
来源：
VACUUM | 1986年 / 36卷 / 11-12期
关键词：
D O I：
10.1016/0042-207X(86)90116-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：807 / 811
页数：5
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