THE INFLUENCE OF ALKALI ATOMS IMPLANTED IN SILICON ON THE NEGATIVE SECONDARY ION EMISSION

被引:2
|
作者
FRENTRUP, W
GRIEPENTROG, M
KLOSE, H
KREYSCH, G
MULLERJAHREIS, U
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1984年 / 84卷 / 01期
关键词
D O I
10.1002/pssa.2210840134
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:269 / 272
页数:4
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