THE 1ST OBSERVATION OF RHEED INTENSITY OSCILLATION DURING THE GROWTH OF CU/MO MULTILAYERED FILMS

被引：14

作者：

KANEKO, T ^{[1
]}

IMAFUKU, M ^{[1
]}

KOKUBU, C ^{[1
]}

YAMAMOTO, R ^{[1
]}

DOYAMA, M ^{[1
]}

机构：

[1] UNIV TOKYO,FAC ENGN,DEPT MET & MAT SCI,BUNKYO KU,TOKYO 113,JAPAN

来源：

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1986年 / 55卷 / 08期

关键词：

D O I：

10.1143/JPSJ.55.2903

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：2903 / 2904

页数：2

共 7 条

[1] THICKNESS PERIODICITY IN THE AUGER LINE-SHAPES FROM EPITAXIAL (111)PD-(111)CU FILMS [J].

CHAO, SS ;

VOOK, RW ;

NAMBA, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03) :695-699

[2] TEMPORAL INTENSITY VARIATIONS IN RHEED PATTERNS DURING FILM GROWTH OF GAAS BY MBE [J].

DOBSON, PJ ;

NORTON, NG ;

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VACUUM, 1983, 33 (10-1) :593-596

[3] THICKNESS PERIODICITY IN THE AUGER LINE-SHAPE FROM EPITAXIAL (111)CU FILMS [J].

NAMBA, Y ;

VOOK, RW ;

CHAO, SS .

SURFACE SCIENCE, 1981, 109 (02) :320-330

[4] DYNAMICS OF FILM GROWTH OF GAAS BY MBE FROM RHEED OBSERVATIONS [J].

NEAVE, JH ;

JOYCE, BA ;

DOBSON, PJ ;

NORTON, N .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01) :1-8

[5] ONE ATOMIC LAYER HETEROINTERFACE FLUCTUATIONS IN GAAS-ALAS QUANTUM WELL STRUCTURES AND THEIR SUPPRESSION BY INSERTION OF SMOOTHING PERIOD IN MOLECULAR-BEAM EPITAXY [J].

SAKAKI, H ;

TANAKA, M ;

YOSHINO, J .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (06) :L417-L420

[6] PHASE-LOCKED EPITAXY USING RHEED INTENSITY OSCILLATION [J].

SAKAMOTO, T ;

FUNABASHI, H ;

OHTA, K ;

NAKAGAWA, T ;

KAWAI, NJ ;

KOJIMA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (09) :L657-L659

[7] AUGER LINE-SHAPE ANALYSES FOR EPITAXIAL-GROWTH IN THE CU/CU, AG/AG AND AG/CU SYSTEMS [J].

VOOK, RW ;

NAMBA, Y .

APPLICATIONS OF SURFACE SCIENCE, 1982, 11-2 (JUL) :400-407

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