BEAM TECHNIQUES FOR THE ANALYSIS OF POORLY CONDUCTING MATERIALS

被引:63
作者
WERNER, HW
WARMOLTZ, N
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词
D O I
10.1116/1.572559
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:726 / 731
页数:6
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共 38 条
[21]  
MCCAUGHAN DV, 1974, CHARACTERIZATION SOL, pCH22
[22]  
REDHEAD PA, 1968, PHYSICAL BASIS ULTRA
[23]   CHARGING EFFECTS IN THE SECONDARY ION MASS-SPECTROMETRIC ANALYSIS OF TARGETS CONTAINING LOW-CONDUCTIVITY REGIONS [J].
REUTER, W ;
YU, ML ;
FRISCH, MA ;
SMALL, MB .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) :850-855
[24]  
Smets B.M.J., 1981, VERRES REFRACTARIES, V35, P84
[25]  
SMETS BMJ, 1981, PHYS CHEM GLASSES, V22, P158
[26]  
SMETS BMJ, 1982, PHYS CHEM GLASSES, V23, P83
[27]  
SMETS BMJ, 1983, PHYS CHEM GLASSES, V24, P35
[28]   SURFACE-ANALYSIS OF GLASS IN THE ELECTRONICS INDUSTRY [J].
SMETS, BMJ ;
GOSSINK, RG .
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1983, 314 (03) :285-288
[29]   THE STRUCTURE OF GLASSES AND CRYSTALLINE COMPOUNDS IN THE SYSTEM PBO-SIO2, STUDIED BY X-RAY PHOTO-ELECTRON SPECTROSCOPY [J].
SMETS, BMJ ;
LOMMEN, TPA .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1982, 48 (2-3) :423-430
[30]  
STAGG JP, 1977, APPL PHYS LETT, V31, P5326