BEAM TECHNIQUES FOR THE ANALYSIS OF POORLY CONDUCTING MATERIALS

被引:63
作者
WERNER, HW
WARMOLTZ, N
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词
D O I
10.1116/1.572559
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:726 / 731
页数:6
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