PIEZOCERAMIC HF RESONATOR WITH ZERO-TEMPERATURE COEFFICIENT

The ternary piezoelectric material Pb0.97Sr0.03[Zr0.458Ti0.452(Mn1/3Nb2/3)0.09]O3 in the tetragonal phase near the morphotropic phase boundary (MPB) was prepared in this study. By properly varying the sintering and poling conditions, the zero temperature coefficient of the resonant frequency of the thickness vibration mode can be reached due to the slight shift of the MPB region. The computed Bechmann number based on the principle of trapped energy revealed that the high-frequency resonators with electrode width of at least less than 1 mm are suggested corresponding to the plate thickness of 0.205 mm to exhibit better resonance performance due to the suppression of unwanted mode coupling.