DETERMINATION OF STOICHIOMETRY OF SIOX THIN-FILMS USING AN AUGER PARAMETER

被引：18

作者：

ALFONSETTI, R

LOZZI, L

PASSACANTANDO, M

PICOZZI, P

SANTUCCI, S

机构：

[1] Dipartimento di Fisica, Università degli Studi di L'Aquila, 67010 Coppito, AQ

来源：

THIN SOLID FILMS | 1992年 / 213卷 / 02期

关键词：

D O I：

10.1016/0040-6090(92)90276-H

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：158 / 159

页数：2

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