HYDROGEN IN SILICON - STATE, REACTIVITY AND EVOLUTION AFTER ION-IMPLANTATION

被引:18
作者
CEROEOLINI, GF [1 ]
OTTAVIANI, G [1 ]
机构
[1] UNIV MODENA,DEPARTIMENTO FIS,I-41100 MODENA,ITALY
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 4卷 / 1-4期
关键词
D O I
10.1016/0921-5107(89)90209-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:19 / 24
页数:6
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