HIGH-RESOLUTION ELECTRON-MICROSCOPIC STUDIES OF AMORPHOUS SIO FILM

被引：42

作者：

KAITO, C

SHIMIZU, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 01期

关键词：

D O I：

10.1143/JJAP.23.L7

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L7 / L8

页数：2

共 8 条

[1] STRUCTURE OF SILICON OXIDE FILMS [J].

COLEMAN, MV ;

THOMAS, DJD .

PHYSICA STATUS SOLIDI, 1967, 22 (02) :593-&

[2]

FRANK J, 1973, OPTIK, V38, P513

[3]

JAMES RW, 1965, OPTICAL PRINCIPLES D, P513

[4] HIGH-RESOLUTION ELECTRON-MICROSCOPIC STUDIES OF CRYSTALLOGRAPHIC SHEAR STRUCTURES IN REDUCED RUTILE CRYSTALS [J].

KAITO, C ;

IWANISHI, M ;

HARADA, T ;

MIYANO, T ;

SHIOJIRI, M .

TRANSACTIONS OF THE JAPAN INSTITUTE OF METALS, 1983, 24 (06) :450-460

[5] THE THEORETICAL RESOLUTION LIMIT OF THE ELECTRON MICROSCOPE [J].

SCHERZER, O .

JOURNAL OF APPLIED PHYSICS, 1949, 20 (01) :20-29

[6] ELECTRON-MICROSCOPIC STUDIES OF STRUCTURE AND CRYSTALLIZATION OF AMORPHOUS METAL-OXIDE FILMS [J].

SHIOJIRI, M ;

MIYANO, T ;

KAITO, C .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (10) :1937-1945

[7] STRUCTURE AND CRYSTALLIZATION OF VERY THIN AMORPHOUS WO3 FILMS [J].

SHIOJIRI, M ;

MIYANO, T ;

KAITO, C .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (03) :567-568

[8] HIGH-RESOLUTION ELECTRON-MICROSCOPY OF AMORPHOUS-LIKE TITANIUM-OXIDE FILMS [J].

YAMADA, Y ;

YOSHIDA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (04) :759-759

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