PHOTOABLATIVE ETCHING OF LANGMUIR-BLODGETT-FILMS

被引：2

作者：

MAGAN, JD ^{[1
]}

LEMOINE, P ^{[1
]}

BLAU, W ^{[1
]}

HOGAN, M ^{[1
]}

LUPO, D ^{[1
]}

PRASS, W ^{[1
]}

SCHEUNEMANN, U ^{[1
]}

机构：

[1] HOECHST AG,W-6230 FRANKFURT 80,GERMANY

来源：

THIN SOLID FILMS | 1990年 / 191卷 / 02期

关键词：

D O I：

10.1016/0040-6090(90)90385-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The photoablative properties of a variety of Langmuir-Blodgett (LB) films on silicon and quartz are reported at 193 nm and at 248 nm. The etch rate is observed to change for very thin films depending on the substrate material. No spectral changes have been observed in the remaining material, suggesting no degradation, and this technique appears to be viable for use in the lithography of LB films. © 1990.

引用

页码：349 / 359

页数：11

共 50 条

[31] HOMOMOLECULAR LANGMUIR-BLODGETT-FILMS FOR SHG
ASHWELL, GJ
YU, GD
LOCHUN, D
JACKSON, PD
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 208 : 261 - POLY
[32] PYROELECTRIC ORGANORUTHENIUM LANGMUIR-BLODGETT-FILMS
POULTER, MW
ROBERTS, GG
COSTELLO, JF
DAVIES, SG
EDWARDS, AJ
THIN SOLID FILMS, 1992, 210 (1-2) : 427 - 429
[33] RBS ANALYSIS OF LANGMUIR-BLODGETT-FILMS
LAURSEN, T
PALMER, GR
AMM, DT
JOHNSON, D
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 82 (01): : 125 - 128
[34] THERMOSTABILITY OF POLYMERIC LANGMUIR-BLODGETT-FILMS
TIPPMANNKRAYER, P
RIEGLER, H
PAUDLER, M
MOHWALD, H
SIEGMUND, HU
EICKMANS, J
SCHEUNEMANN, U
LICHT, U
SCHREPP, W
ADVANCED MATERIALS, 1991, 3 (01) : 46 - 51
[35] THERMODESORPTION SPECTROSCOPY OF LANGMUIR-BLODGETT-FILMS
LAXHUBER, LA
MOHWALD, H
LANGMUIR, 1987, 3 (05) : 837 - 845
[36] ELLIPSOMETRY ON ANISOTROPIC LANGMUIR-BLODGETT-FILMS
GEISS, G
HICKEL, W
LUPO, D
PRASS, W
SCHEUNEMANN, U
BERICHTE DER BUNSEN-GESELLSCHAFT-PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 1991, 95 (11): : 1345 - 1349
[37] FORMATION AND LUBRICITY OF LANGMUIR-BLODGETT-FILMS
KOHNO, A
SUGIURA, M
JOURNAL OF JAPAN SOCIETY OF LUBRICATION ENGINEERS, 1986, 31 (10): : 703 - 707
[38] ON THE DEGRADATION OF CONDUCTING LANGMUIR-BLODGETT-FILMS
CARRARA, S
GUSSONI, A
EROKHIN, V
NICOLINI, C
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1995, 6 (02) : 79 - 83
[39] PREFORMED POLYMERS FOR LANGMUIR-BLODGETT-FILMS
HODGE, P
DAVIS, F
TREDGOLD, RH
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1990, 330 (1610): : 153 - 166
[40] THE ORIENTATION OF QUINQUETHIOPHENE IN LANGMUIR-BLODGETT-FILMS
VUORIMAA, E
YLILAHTI, P
IKONEN, M
LEMMETYINEN, H
THIN SOLID FILMS, 1990, 190 (01) : 175 - 180

← 1 2 3 4 5 →