PHOTOABLATIVE ETCHING OF LANGMUIR-BLODGETT-FILMS

被引：2

作者：

MAGAN, JD ^{[1
]}

LEMOINE, P ^{[1
]}

BLAU, W ^{[1
]}

HOGAN, M ^{[1
]}

LUPO, D ^{[1
]}

PRASS, W ^{[1
]}

SCHEUNEMANN, U ^{[1
]}

机构：

[1] HOECHST AG,W-6230 FRANKFURT 80,GERMANY

来源：

THIN SOLID FILMS | 1990年 / 191卷 / 02期

关键词：

D O I：

10.1016/0040-6090(90)90385-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The photoablative properties of a variety of Langmuir-Blodgett (LB) films on silicon and quartz are reported at 193 nm and at 248 nm. The etch rate is observed to change for very thin films depending on the substrate material. No spectral changes have been observed in the remaining material, suggesting no degradation, and this technique appears to be viable for use in the lithography of LB films. © 1990.

引用

页码：349 / 359

页数：11

共 50 条

[11] LANGMUIR-BLODGETT-FILMS OF COPOLYPYRROLES
SERVAY, TK
SIMMONS, A
TINDALL, D
HEROD, T
DURAN, RS
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 209 : 246 - POLY
[12] FERROELECTRIC LANGMUIR-BLODGETT-FILMS
PALTO, S
BLINOV, L
BUNE, A
DUBOVIK, E
FRIDKIN, V
PETUKHOVA, N
VERKHOVSKAYA, K
YUDIN, S
FERROELECTRICS LETTERS SECTION, 1995, 19 (3-4) : 65 - 68
[13] PROTEIN LANGMUIR-BLODGETT-FILMS
LVOV, YM
EROKHIN, VV
ZAITSEV, SY
BIOLOGICHESKIE MEMBRANY, 1990, 7 (09): : 917 - 937
[14] BRILLOUIN SPECTROSCOPY OF LANGMUIR-BLODGETT-FILMS
ZANONI, R
NASELLI, C
BELL, J
STEGEMAN, G
SPRAGUE, R
SEATON, C
LINDSAY, S
THIN SOLID FILMS, 1985, 134 (1-3) : 179 - 186
[15] LANGMUIR-BLODGETT-FILMS AND NONLINEAR OPTICS
KHANARIAN, G
THIN SOLID FILMS, 1987, 152 (1-2) : 265 - 274
[16] POSSIBLE APPLICATIONS FOR LANGMUIR-BLODGETT-FILMS
PETTY, MC
THIN SOLID FILMS, 1992, 210 (1-2) : 417 - 426
[17] LANGMUIR-BLODGETT-FILMS FOR NONLINEAR OPTICS
NEAL, DB
PETTY, MC
ROBERTS, GG
AHMAD, MM
FEAST, WJ
GIRLING, IR
CADE, NA
KOLINSKY, PV
PETERSON, IR
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1986, 33 (06) : 800 - 801
[18] COPOLYSILOXANES AS PYROELECTRIC LANGMUIR-BLODGETT-FILMS
RICHARDSON, T
HOLDER, S
LACEY, D
MOLECULAR CRYSTALS AND LIQUID CRYSTALS SCIENCE AND TECHNOLOGY SECTION A-MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 1993, 234 : 685 - 690
[19] STM INVESTIGATION OF LANGMUIR-BLODGETT-FILMS
FUCHS, H
SCHREPP, W
ROHRER, H
SURFACE SCIENCE, 1987, 181 (1-2) : 391 - 393
[20] ELECTROOXIDATION OF DIOCTADECYLTHIOETHYLENEDITHIOTETRATHIOFULVALENE LANGMUIR-BLODGETT-FILMS
MORAND, JP
BRZEZINSKI, L
LOPEZ, MC
THIN SOLID FILMS, 1992, 210 (1-2) : 280 - 282

← 1 2 3 4 5 →