PHOTOABLATIVE ETCHING OF LANGMUIR-BLODGETT-FILMS

被引：2

作者：

MAGAN, JD ^{[1
]}

LEMOINE, P ^{[1
]}

BLAU, W ^{[1
]}

HOGAN, M ^{[1
]}

LUPO, D ^{[1
]}

PRASS, W ^{[1
]}

SCHEUNEMANN, U ^{[1
]}

机构：

[1] HOECHST AG,W-6230 FRANKFURT 80,GERMANY

来源：

THIN SOLID FILMS | 1990年 / 191卷 / 02期

关键词：

D O I：

10.1016/0040-6090(90)90385-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The photoablative properties of a variety of Langmuir-Blodgett (LB) films on silicon and quartz are reported at 193 nm and at 248 nm. The etch rate is observed to change for very thin films depending on the substrate material. No spectral changes have been observed in the remaining material, suggesting no degradation, and this technique appears to be viable for use in the lithography of LB films. © 1990.

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页码：349 / 359

页数：11

相关论文

共 10 条

[1] OPTICAL 2ND-HARMONIC GENERATION IN LANGMUIR-BLODGETT FILMS OF 2-DOCOSYLAMINO-5-NITROPYRIDINE [J].

DECHER, G ;

TIEKE, B ;

BOSSHARD, C ;

GUNTER, P .

JOURNAL OF THE CHEMICAL SOCIETY-CHEMICAL COMMUNICATIONS, 1988, (14) :933-934

[2] DIRECT-ETCHING STUDIES OF POLYMER-FILMS USING A 157-NM F2 LASER [J].

DYER, PE ;

SIDHU, J .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1986, 3 (05) :792-795

[3] STRUCTURE AND PROPERTIES OF LANGMUIR-BLODGETT FILMS MADE FROM POLYAMIDES [J].

LUPO, D ;

PRASS, W ;

SCHEUNEMANN, U .

THIN SOLID FILMS, 1989, 178 :403-411

[4] 2ND-HARMONIC GENERATION IN LANGMUIR-BLODGETT MONOLAYERS OF STILBAZIUM SALT AND PHENYLHYDRAZONE DYES [J].

LUPO, D ;

PRASS, W ;

SCHEUNEMANN, U ;

LASCHEWSKY, A ;

RINGSDORF, H ;

LEDOUX, I .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1988, 5 (02) :300-308

[5]

Magan J. D., 1989, Chemtronics, V4, P74

[6]

MAGAN JD, 1989, J MOL ELECTRON, V5, P247

[7] NON-LINEAR OPTICAL-PROPERTIES OF HEMICYANINE MONOLAYERS AND THE PROTONATION EFFECT [J].

MAROWSKY, G ;

CHI, LF ;

MOBIUS, D ;

STEINHOFF, R ;

SHEN, YR ;

DORSCH, D ;

RIEGER, B .

CHEMICAL PHYSICS LETTERS, 1988, 147 (05) :420-424

[8] 2ND HARMONIC-GENERATION FROM LB SUPERLATTICES CONTAINING 2 ACTIVE COMPONENTS [J].

NEAL, DB ;

PETTY, MC ;

ROBERTS, GG ;

AHMAD, MM ;

FEAST, WJ ;

GIRLING, IR ;

CADE, NA ;

KOLINSKY, PV ;

PETERSON, IR .

ELECTRONICS LETTERS, 1986, 22 (09) :460-462

[9] AN APPLIED SCIENCE PERSPECTIVE OF LANGMUIR-BLODGETT FILMS [J].

ROBERTS, GG .

ADVANCES IN PHYSICS, 1985, 34 (04) :475-512

[10] LASER ABLATION OF POLYMERS [J].

YEH, JTC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :653-658