A STAGGERED-MESH FINITE-DIFFERENCE NUMERICAL-METHOD FOR SOLVING THE TRANSPORT-EQUATIONS IN LOW-PRESSURE RF GLOW-DISCHARGES

被引：58
作者：
BARNES, MS
COTLER, TJ
ELTA, ME
机构：
来源：
JOURNAL OF COMPUTATIONAL PHYSICS | 1988年 / 77卷 / 01期
关键词：
D O I：
10.1016/0021-9991(88)90156-8
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
引用
收藏
页码：53 / 72
页数：20
相关论文
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