THIN-FILM PLATINUM RESISTANCE THERMOMETERS - FABRICATION AND USE

被引：10
作者：
BOLKER, BFT
SIDLES, PH
机构：
[1] GOULD LABS,ROLLING MEADOWS,IL 60008
[2] US ERDA,AMES LAB,AMES,IA 50011
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期
关键词：
D O I：
10.1116/1.569123
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：205 / 209
页数：5
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