PIEZORESISTIVE PROPERTIES OF POLYCRYSTALLINE SILICON

被引：65

作者：

SETO, JYW ^{[1
]}

机构：

[1] GM CORP,CTR TECH,DEPT ELECTR,RES LABS,WARREN,MI 48090

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 11期

关键词：

D O I：

10.1063/1.322515

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4780 / 4783

页数：4

共 10 条

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SETO, JYW .

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[8] ELECTRICAL PROPERTIES OF POLYCRYSTALLINE SILICON FILMS [J].

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JOURNAL OF APPLIED PHYSICS, 1975, 46 (12) :5247-5254

[9] RECENT DEVELOPMENTS IN SEMICONDUCTOR PIEZORESISTIVE DEVICES [J].

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[10]

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