CHARACTERIZATION OF SILICON-COMPOUNDS USING THE AUGER PARAMETER IN X-RAY PHOTOELECTRON-SPECTROSCOPY (XPS)

被引：30
作者：
KOHIKI, S [1 ]
OZAKI, S [1 ]
HAMADA, T [1 ]
TANIGUCHI, K [1 ]
机构：
[1] OSAKA ELECTROCOMMUN UNIV,DEPT SOLID STATE ELECTR,NEYAGAWA,OSAKA 572,JAPAN
来源：
APPLIED SURFACE SCIENCE | 1987年 / 28卷 / 02期
关键词：
D O I：
10.1016/0169-4332(87)90057-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：103 / 110
页数：8
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