METAL-INSULATOR-SUPERCONDUCTOR FIELD-EFFECT-TRANSISTOR USING SRTIO3 YBA2CU3OY HETEROEPITAXIAL FILMS

被引：44

作者：

FUJII, T

SAKUTA, K

AWAJI, T

MATSUI, K

HIRANO, T

OGAWA, Y

KOBAYASHI, T

机构：

[1] Department of Electrical Engineering, Osaka University, Toyonaka, Osaka, 560, 1-1, Machikaneyama

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1992年 / 31卷 / 5B期

关键词：

MISFET; YBA2CU3OY; SRTIO3; FIELD-EFFECT TRANSISTOR; EPITAXY; SUPERCONDUCTIVITY;

D O I：

10.1143/JJAP.31.L612

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Planar-type metal-insulator-superconductor field-effect-transistors (MISFET) were fabricated and their current modulation characteristics were investigated. The FET had a structure of Al-gate metal/(100)SrTiO3-gate insulator/(001)YBa2Cu3Oy-channel, where the oxide layers were grown by selective heteroepitaxy employing pulsed ArF excimer laser deposition. The FET gate was 10-mu-m long and 100-mu-m wide. Apparent field-effect modulation of drain current was seen in both the normal (T > T(c)) and superconducting (T < T(c)) states. In the superconducting state, not only the critical current but also flux-flow resistance were appreciably changed according to the applied gate voltage.

引用

页码：L612 / L615

页数：4

共 13 条

[1] WET ETCH PROCESS FOR PATTERNING INSULATORS SUITABLE FOR EPITAXIAL HIGH-TC SUPERCONDUCTING THIN-FILM MULTILEVEL ELECTRONIC-CIRCUITS [J].

EIDELLOTH, W ;

GALLAGHER, WJ ;

ROBERTAZZI, RP ;

KOCH, RH ;

OH, B ;

SANDSTROM, RL .

APPLIED PHYSICS LETTERS, 1991, 59 (10) :1257-1259

[2] METALLIC AND SUPERCONDUCTING SURFACES OF YBA2CU3O7 PROBED BY ELECTROSTATIC CHARGE MODULATION OF EPITAXIAL-FILMS [J].

FIORY, AT ;

HEBARD, AF ;

EICK, RH ;

MANKIEWICH, PM ;

HOWARD, RE ;

OMALLEY, ML .

PHYSICAL REVIEW LETTERS, 1990, 65 (27) :3441-3444

[3]

HAN X, IN PRESS 4TH P INT S

[4]

HIRANO T, 1992, IN PRESS JPN J APPL, V31

[5] ELECTRIC-FIELD EFFECT ON THE AL-MGO-YBA2CU3OY STRUCTURE [J].

KABASAWA, U ;

ASANO, K ;

KOBAYASHI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (01) :L86-L88

[6]

KOBAYASHI T, 1990, 2ND P C SCI TECHN TH, P569

[7]

KOBAYASHI T, 1990, STUDIES HIGH TEMPERA, V6, P297

[8] FIELD-EFFECT CONDUCTANCE OF YBA2CU3O6 [J].

LEVY, A ;

FALCK, JP ;

KASTNER, MA ;

GALLAGHER, WJ ;

GUPTA, A ;

KLEINSASSER, AW .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) :4439-4441

[9] INFLUENCE OF ELECTRIC-FIELDS ON PINNING IN YBA2CU3O7-DELTA FILMS [J].

MANNHART, J ;

SCHLOM, DG ;

BEDNORZ, JG ;

MULLER, KA .

PHYSICAL REVIEW LETTERS, 1991, 67 (15) :2099-2101

[10] C-V-CHARACTERISTICS OF AG-MGO-HIGH-TC SUPERCONDUCTOR MIS DIODE [J].

MYOREN, H ;

ISHIKAWA, T ;

OSAKA, Y .

PHYSICA C, 1991, 185 :2529-2530

← 1 2 →