PREPARATION OF SUBMICRON (NBV)N SUPERCONDUCTING THIN-FILM STRIP PARTICLE DETECTORS

被引：1

作者：

LUZZI, G

NIGRO, A

VAGLIO, R

CIRILLO, M

GENTILI, M

LUCIANI, L

机构：

[1] Dipartimento di Fisica, Universitá di Salerno, I-84081 Baronissi, Salerno

[2] Dipartimento di Fisica, Universitá di Roma Tor Vergata

[3] Istituto di Elettronica dello Stato Solido, CNR, 00156 Roma

来源：

MICROELECTRONIC ENGINEERING | 1992年 / 17卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(92)90112-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Superconducting thin film particle detectors can be specially attractive for minimum ionizing particle detection due to the high efficiency and low sensitivity to radiation damage. In this paper we describe the fabrication procedure and the characterization of (NbV)N films and the set-up of photolithographyc processes to realize well defined submicron lines on these films in order to produce and test, in the near future, full operating detectors based on such material.

引用

页码：547 / 550

页数：4