TEMPERATURE-DEPENDENT EBIC DIFFUSION-LENGTH MEASUREMENTS IN SILICON

被引:14
作者
KITTLER, M
SEIFERT, W
SCHRODER, KW
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 93卷 / 01期
关键词
D O I
10.1002/pssa.2210930173
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:K101 / K104
页数:4
相关论文
共 13 条
[1]   INJECTION AND DOPING DEPENDENCE OF SEM AND SCANNING LIGHT SPOT DIFFUSION LENGTH MEASUREMENTS IN SILICON POWER RECTIFIERS [J].
DAVIDSON, SM ;
INNES, RM ;
LINDSAY, SM .
SOLID-STATE ELECTRONICS, 1982, 25 (04) :261-272
[2]   ELECTRON-BEAM-INDUCED CURRENTS IN SEMICONDUCTORS [J].
HANOKA, JI ;
BELL, RO .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1981, 11 :353-380
[3]   ELECTRICAL-PROPERTIES OF STACKING-FAULTS AND PRECIPITATES IN HEAT-TREATED DISLOCATION-FREE CZOCHRALSKI SILICON [J].
KIMERLING, LC ;
LEAMY, HJ ;
PATEL, JR .
APPLIED PHYSICS LETTERS, 1977, 30 (05) :217-219
[4]   DETERMINATION OF SEMICONDUCTOR PARAMETERS AND OF THE VERTICAL STRUCTURE OF DEVICES BY NUMERICAL-ANALYSIS OF ENERGY-DEPENDENT EBIC MEASUREMENTS [J].
KITTLER, M ;
SCHRODER, KW .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1983, 77 (01) :139-151
[5]  
MAHLKE B, 1981, 10 P TAG EL LEIPZ, P256
[6]  
MENNIGER H, 1978, 9 TAG EL DRESD, P74
[7]  
MENNINGER H, COMMUNICATION
[8]  
MOSCHWITZER A, 1981, HALBLEITERLEKTRONIK
[9]   THE TEMPERATURE-DEPENDENCE OF EBIC CONTRAST FROM INDIVIDUAL DISLOCATIONS IN SILICON [J].
OURMAZD, A ;
WILSHAW, PR ;
BOOKER, GR .
JOURNAL DE PHYSIQUE, 1983, 44 (NC-4) :289-295
[10]   ELECTRICAL RECOMBINATION EFFICIENCY OF INDIVIDUAL EDGE DISLOCATIONS AND STACKING-FAULT DEFECTS IN N-TYPE SILICON [J].
OURMAZD, A ;
BOOKER, GR .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 55 (02) :771-784