INTERACTION OF ION-BEAMS WITH POLYMERS, WITH PARTICULAR REFERENCE TO SIMS

被引：220
作者：
BRIGGS, D
HEARN, MJ
机构：
来源：
VACUUM | 1986年 / 36卷 / 11-12期
关键词：
D O I：
10.1016/0042-207X(86)90156-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：1005 / 1010
页数：6
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