MONOLITHICALLY INTEGRATED OPTICAL DISPLACEMENT SENSOR IN GAAS/ALGAAS

被引：13

作者：

HOFSTETTER, D ^{[1
]}

ZAPPE, HP ^{[1
]}

DANDLIKER, R ^{[1
]}

机构：

[1] UNIV NEUCHATEL,INST MICROTECHNOL,CH-2000 NEUCHATEL,SWITZERLAND

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 24期

关键词：

DISPLACEMENT MEASUREMENT; OPTICAL SENSORS; INTEGRATED OPTOELECTRONICS;

D O I：

10.1049/el:19951455

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A monolithically integrated displacement sensor has been fabricated in the GaAs/AlGaAs material system The device is configured as a Michelson interferometer and consists of a DBR laser, a directional coupler, transparent waveguides and a photodetector. Interference fringes could be seen at measurement distance of up to 45cm, requiring only the alignment of an external GRIN lens for beam collimation.

引用

页码：2121 / 2122

页数：2

共 7 条

[1]

HELLESO OG, 1995, SENSOR ACTUAT A-PHYS, V46, P478

[2] MULTIPLE WAVELENGTH FABRY-PEROT LASERS FABRICATED BY VACANCY-ENHANCED QUANTUM-WELL DISORDERING [J].

HOFSTETTER, D ;

ZAPPE, HP ;

EPLER, JE ;

RIEL, P .

APPLIED PHYSICS LETTERS, 1995, 67 (14) :1978-1980

[3] SINGLE-GROWTH-STEP GAAS/ALGAAS DISTRIBUTED-BRAGG-REFLECTOR LASERS WITH HOLOGRAPHICALLY-DEFINED RECESSED GRATINGS [J].

HOFSTETTER, D ;

ZAPPE, HP ;

EPLER, JE ;

SOCHTIG, J .

ELECTRONICS LETTERS, 1994, 30 (22) :1858-1859

[4] MONOLITHICALLY INTEGRATED DBR LASER, DETECTOR, AND TRANSPARENT WAVE-GUIDE FABRICATED IN A SINGLE GROWTH STEP [J].

HOFSTETTER, D ;

ZAPPE, HP ;

EPLER, JE ;

RIEL, P .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (09) :1022-1024

[5] INTEGRATED-OPTIC INTERFEROMETRIC MICRODISPLACEMENT SENSOR IN GLASS WITH THERMOOPTIC PHASE MODULATION [J].

JESTEL, D ;

BAUS, A ;

VOGES, E .

ELECTRONICS LETTERS, 1990, 26 (15) :1144-1145

[6] INTEGRATED-OPTIC HETERODYNE INTERFEROMETER FOR DISPLACEMENT MEASUREMENT [J].

TODA, H ;

HARUNA, M ;

NISHIHARA, H .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1991, 9 (05) :683-687

[7]

ULBERS G, 1991, SPIE MICROOPTICS 2, V1506, P99

← 1 →