STRUCTURAL AND PHASE-TRANSFORMATIONS IN ELECTRON-BEAM-TREATED TITANIUM FILMS

被引：3

作者：

CHAPLANOV, AM ^{[1
]}

SHIBKO, AN ^{[1
]}

DJAKOV, T ^{[1
]}

MLADENOV, G ^{[1
]}

机构：

[1] BULGARIAN ACAD SCI,INST ELECTR,BU-1113 SOFIA,BULGARIA

来源：

THIN SOLID FILMS | 1986年 / 143卷 / 02期

关键词：

CRYSTALS - Structure - ELECTRON BEAMS - FILMS - Radiation Effects - MICROSCOPIC EXAMINATION;

D O I：

10.1016/0040-6090(86)90386-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Structural and phase transformations in polycrystalline and epitaxial titanium films exposed to an electron beam of power density 11 W cm** minus **2 were studied. Polycrystalline titanium films treated with an electron beam at 6 J cm** minus **2 are shown to undergo recrystallization process which result in an increase in grain sizes, while at an energy density of 24 J cm** minus **2 oxidation processes take place leading to the formation and growth of pores. The electron-beam-treated epitaxial titanium films form an ordered solid solution of oxygen in titanium, of stoichiometry Ti//3O.

引用

页码：187 / 192

页数：6