DEVELOPMENT OF RF PLASMA GENERATORS FOR NEUTRAL BEAMS

被引：20

作者：

VELLA, MC ^{[1
]}

EHLERS, KW ^{[1
]}

KIPPENHAN, D ^{[1
]}

PINCOSY, PA ^{[1
]}

PYLE, RV ^{[1
]}

DIVERGILIO, WF ^{[1
]}

FOSNIGHT, VV ^{[1
]}

机构：

[1] TRW,ENERGY RES CTR,REDONDO BEACH,CA 90278

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573067

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1218 / 1221

页数：4

共 10 条

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