THE USE OF METALORGANICS IN THE PREPARATION OF SEMICONDUCTOR-MATERIALS .8. FEASIBILITY STUDIES OF THE GROWTH OF GROUP-III-GROUP-V COMPOUNDS OF BORON BY MOCVD

被引：24
作者：
MANASEVIT, HM
HEWITT, WB
NELSON, AJ
MASON, AR
机构：
[1] TRW CO INC,OPERAT & SUPPORT GRP,REDONDO BEACH,CA 90278
[2] SOLAR ENERGY RES INST,GOLDEN,CO 80401
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 10期
关键词：
D O I：
10.1149/1.2096403
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：3070 / 3076
页数：7
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