CORRELATION BETWEEN THE STRESS AND MICROSTRUCTURE IN BIAS-SPUTTERED ZRO2-Y2O3 FILMS

被引：38

作者：

KNOLL, RW

BRADLEY, ER

机构：

来源：

THIN SOLID FILMS | 1984年 / 117卷 / 03期

关键词：

D O I：

10.1016/0040-6090(84)90287-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：201 / 210

页数：10

共 21 条

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