QUANTITATIVE-ANALYSIS USING SPUTTERED NEUTRALS IN A SECONDARY ION MICROANALYZER

被引：32

作者：

WILLIAMS, P

STREIT, LA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90274-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：159 / 164

页数：6

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