QUANTITATIVE-ANALYSIS USING SPUTTERED NEUTRALS IN A SECONDARY ION MICROANALYZER

被引：32
作者：
WILLIAMS, P
STREIT, LA
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期
关键词：
D O I：
10.1016/0168-583X(86)90274-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：159 / 164
页数：6
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