OCCURENCE OF HIGH RESISTANCE LAYER AT VAPOR EPITAXIAL GAAS FILM-SUBSTRATE INTERFACE

被引:43
作者
HASEGAWA, F
SAITO, T
机构
关键词
D O I
10.1143/JJAP.7.1125
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1125 / &
相关论文
共 4 条
[1]   PREPARATION OF GAASXP1-X BY VAPOR PHASE REACTION [J].
FINCH, WF ;
MEHAL, EW .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (07) :814-817
[2]  
HASEGAWA F, TO BE PUBLISHED
[3]   PREPARATION OF HIGH PURITY GALLIUM ARSENIDE BY VAPOUR PHASE EPITAXIAL GROWTH [J].
KNIGHT, JR ;
EFFER, D ;
EVANS, PR .
SOLID-STATE ELECTRONICS, 1965, 8 (02) :178-&
[4]  
WOLFE CM, 1968, ELECTROCHEM TECHNOL, V6, P208