SURFACE-LAYER CHARACTERISTICS OF ION-IMPLANTED METALS

被引：15
作者：
IWAKI, M
机构：
来源：
THIN SOLID FILMS | 1983年 / 101卷 / 03期
关键词：
D O I：
10.1016/0040-6090(83)90249-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：223 / 231
页数：9
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