Capacitive Micromachined Ultrasonic Transducers: Technology and Application

被引：79

作者：

Salim, Muhammed Sabri ^{[1
]}

Malek, M. F. Abd ^{[2
]}

Heng, R. B. W. ^{[1
]}

Juni, K. M. ^{[3
]}

Sabri, Naseer ^{[4
]}

机构：

[1] Univ Malaysia Perlis, Sch Mech Engn, Kangar 01000, Malaysia

[2] Univ Malaysia Perlis, Sch Elect Syst Engn, Kangar, Malaysia

[3] Univ Malaysia Perlis, Elect Eng Dept, Politekn Tuanku Syed Sirajuddin, Kangar, Malaysia

[4] Univ Malaysia Perlis, Sch Comp & Commun Engn, Kangar, Malaysia

来源：

JOURNAL OF MEDICAL ULTRASOUND | 2012年 / 20卷 / 01期

关键词：

capacitive micromachined ultrasonic transducer; fabrication; image sensor; ultrasonography;

D O I：

10.1016/j.jmu.2012.02.001

中图分类号：

R8 [特种医学]; R445 [影像诊断学];

学科分类号：

1002 ; 100207 ; 1009 ;

摘要：

Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventional piezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, efficiency, and sensitivity. This research presents the principles of operation, fabrication process steps, and application of the capacitive micromachined ultrasound transducer. The study also demonstrates in detail the collapse voltage design parameter of a cMUT membrane. Several important applications are presented to show the feasibility of using cMUTs which are demonstrated by imaging examples in immersion and air due to the cMUT capability of producing large bandwidth (123% fractional bandwidth) and lower impedance mismatch. Finally, the advantages of three-dimensional echographic images based on moving ultrasound linear array its technique are discussed in detail and compared with those of two-dimensional optical hand geometry. (C) 2012, Elsevier Taiwan LLC and the Chinese Taipei Society of Ultrasound in Medicine.

引用

页码：8 / 31

页数：24

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