Capacitive Micromachined Ultrasonic Transducers: Technology and Application

被引：79

作者：

Salim, Muhammed Sabri ^{[1
]}

Malek, M. F. Abd ^{[2
]}

Heng, R. B. W. ^{[1
]}

Juni, K. M. ^{[3
]}

Sabri, Naseer ^{[4
]}

机构：

[1] Univ Malaysia Perlis, Sch Mech Engn, Kangar 01000, Malaysia

[2] Univ Malaysia Perlis, Sch Elect Syst Engn, Kangar, Malaysia

[3] Univ Malaysia Perlis, Elect Eng Dept, Politekn Tuanku Syed Sirajuddin, Kangar, Malaysia

[4] Univ Malaysia Perlis, Sch Comp & Commun Engn, Kangar, Malaysia

来源：

JOURNAL OF MEDICAL ULTRASOUND | 2012年 / 20卷 / 01期

关键词：

capacitive micromachined ultrasonic transducer; fabrication; image sensor; ultrasonography;

D O I：

10.1016/j.jmu.2012.02.001

中图分类号：

R8 [特种医学]; R445 [影像诊断学];

学科分类号：

1002 ; 100207 ; 1009 ;

摘要：

Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventional piezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, efficiency, and sensitivity. This research presents the principles of operation, fabrication process steps, and application of the capacitive micromachined ultrasound transducer. The study also demonstrates in detail the collapse voltage design parameter of a cMUT membrane. Several important applications are presented to show the feasibility of using cMUTs which are demonstrated by imaging examples in immersion and air due to the cMUT capability of producing large bandwidth (123% fractional bandwidth) and lower impedance mismatch. Finally, the advantages of three-dimensional echographic images based on moving ultrasound linear array its technique are discussed in detail and compared with those of two-dimensional optical hand geometry. (C) 2012, Elsevier Taiwan LLC and the Chinese Taipei Society of Ultrasound in Medicine.

引用

页码：8 / 31

页数：24

共 74 条

[1] Fingerprint liveness detection using local ridge frequencies and multiresolution texture analysis techniques [J].

Abhyankar, Aditya ;

Schuckers, Stephanie .

2006 IEEE INTERNATIONAL CONFERENCE ON IMAGE PROCESSING, ICIP 2006, PROCEEDINGS, 2006, :321-+

[2] Shaping the detection lobe of ultrasonic ranging devices [J].

Abreu, JMM ;

Calderon, L ;

Ceres, R ;

Perez, LA .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1997, 8 (11) :1279-1284

[3]

Averkiou MA, 1997, 1997 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 & 2, P1561, DOI 10.1109/ULTSYM.1997.663294

[4] Capacitive micromachined ultrasonic transducer design for high power transmission [J].

Bayram, B ;

Oralkan, Ö ;

Ergun, AS ;

Hæggström, E .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (02) :326-339

[5] A new regime for operating capacitive micromachined ultrasonic transducers [J].

Bayram, B ;

Haeggström, E ;

Yaralioglu, GG ;

Khuri-Yakub, BT .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2003, 50 (09) :1184-1190

[6] OBSTACLE AVOIDANCE WITH ULTRASONIC SENSORS [J].

BORENSTEIN, J ;

KOREN, Y .

IEEE JOURNAL OF ROBOTICS AND AUTOMATION, 1988, 4 (02) :213-218

[7] A silicon microfabricated electrostatic transducer: 1 MHz transmission in air and in water [J].

Caliano, G ;

Foglietti, V ;

Cianci, E ;

Pappalardo, M .

MICROELECTRONIC ENGINEERING, 2000, 53 (1-4) :573-576

[8]

Calmes S, 1999, ULTRASON, P1163, DOI 10.1109/ULTSYM.1999.849204

[9] DIAGNOSTIC MEASUREMENTS IN CAPACITIVE TRANSDUCERS [J].

CARR, H ;

WYKES, C .

ULTRASONICS, 1993, 31 (01) :13-20

[10]

Cheng C-H., 2001, MICR SYST C, P18

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