HYDROGEN DILUTION EFFECTS ON PROPERTIES OF ECR PLASMA DEPOSITED A-GE-H

被引:15
作者
AOKI, T [1 ]
KATO, S [1 ]
NISHIKAWA, Y [1 ]
HIROSE, M [1 ]
机构
[1] HIROSHIMA UNIV,DEPT ELECT ENGN,HIROSHIMA 724,JAPAN
关键词
D O I
10.1016/0022-3093(89)90724-2
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:798 / 800
页数:3
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