LASER-INDUCED FLUORESCENCE DIAGNOSTICS OF GLOW-DISCHARGES - SPATIALLY RESOLVED CONCENTRATION PROFILES

被引：26
作者：
GOTTSCHO, RA
DAVIS, GP
BURTON, RH
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词：
D O I：
10.1116/1.572192
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：622 / 624
页数：3
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