共 9 条
[1]
A STUDY OF THE EFFECT OF KEY PROCESSING VARIABLES ON THE LITHOGRAPHIC PERFORMANCE OF MICROPOSIT SAL601-ER7 RESIST
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:2280-2285
[2]
DAMMEL R, 1992, P AM CHEM SOC DIV PO, V66, P184
[4]
ITO H, 1991, ACS SYM SER, V475, P326
[5]
LINGNAU J, 1990, POLYM MICROELECTRONI, P445
[6]
EFFECT OF ACID DIFFUSION ON RESOLUTION OF A CHEMICALLY AMPLIFIED RESIST IN X-RAY-LITHOGRAPHY
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
1991, 30 (10)
:2619-2625
[7]
NOVEMBRE AE, 1990, POLYM PREPR AM CHEM, V31, P379
[8]
TAGAWA S, 1992, P AM CHEM SOC, V66, P188
[9]
PULSE-RADIOLYSIS OF POLYSTYRENE AND BENZENE IN CYCLOHEXANE, CHLOROFORM AND CARBON-TETRACHLORIDE
[J].
RADIATION PHYSICS AND CHEMISTRY,
1983, 21 (1-2)
:239-243