HIGH-ACCURACY DISTANCE MEASUREMENTS WITH MULTIPLE-WAVELENGTH INTERFEROMETRY

被引：1
|
作者：
DANDLIKER, R
HUG, K
POLITCH, J
ZIMMERMANN, E
机构：
来源：
OPTICAL ENGINEERING | 1995年 / 34卷 / 08期
关键词：
INTERFEROMETRY; MULTIPLE WAVELENGTH; DISTANCE MEASUREMENT; RANGING;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Multiple-wavelength interferometry is, like classical interferometry, a coherent method, but it offers great flexibility in sensitivity by an appropriate choice of the different wavelengths and it can be operated on rough surfaces. The accuracy of this method depends essentially on the signal processing and on the properties of the source. Practical considerations for distances in the range of several meters with micrometer resolution are given.
引用
收藏
页码：2407 / 2412
页数：6
相关论文
共 50 条
  • [41] High-accuracy interferometry of extreme ultraviolet lithographic optical systems
    Goldberg, KA
    Naulleau, P
    Lee, S
    Bresloff, C
    Henderson, C
    Attwood, D
    Bokor, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06): : 3435 - 3439
  • [42] A high-accuracy signal processing algorithm for frequency scanned interferometry
    Zhang, Shuai
    Yang, Liangen
    Wang, Xuanze
    Zhai, Zhongsheng
    Liu, Wenchao
    SIXTH INTERNATIONAL SYMPOSIUM ON PRECISION MECHANICAL MEASUREMENTS, 2013, 8916
  • [43] International comparison of high-accuracy roundness measurements
    Frennberg, M
    Sacconi, A
    METROLOGIA, 1996, 33 (06) : 539 - 544
  • [44] INITIAL FIELD-TESTS OF A MULTIPLE-WAVELENGTH ELECTROMAGNETIC DISTANCE-MEASURING INSTRUMENT
    SLATER, LE
    HUGGETT, GR
    SMITH, SW
    TRANSACTIONS-AMERICAN GEOPHYSICAL UNION, 1974, 55 (04): : 219 - 219
  • [45] High-accuracy frequency measurements in the far infrared
    Beverini, N
    Carelli, G
    De Michele, A
    Maccioni, E
    Moretti, A
    Nyushkov, B
    Sorrentino, F
    LASER PHYSICS, 2005, 15 (07) : 1014 - 1020
  • [46] High-accuracy measurements of the normal specular reflectance
    Voarino, Philippe
    Piombini, Herve
    Sabary, Frederic
    Marteau, Daniel
    Dubard, Jimmy
    Hameury, Jacques
    Filtz, Jean Remy
    APPLIED OPTICS, 2008, 47 (13) : C303 - C309
  • [47] International comparison of high-accuracy roundness measurements
    Swedish Natl Testing and Research, Inst, Boras, Sweden
    Metrologia, 6 (539-544):
  • [48] Ultrasonic Interferometer for High-Accuracy Linear Measurements
    Konkov, E.
    MEASUREMENT SCIENCE REVIEW, 2009, 9 (06): : 187 - 188
  • [49] HIGH-ACCURACY ISOTOPE ABUNDANCE MEASUREMENTS FOR METROLOGY
    DEBIEVRE, P
    VALKIERS, S
    SCHAEFER, F
    PEISER, HS
    SEYFRIED, P
    PTB-MITTEILUNGEN, 1994, 104 (04): : 225 - 236
  • [50] Error analysis in high-accuracy digital measurements
    Barros e Vasconcellos, Renata T.
    de Campos, Marcello L. R.
    MEASUREMENT, 2012, 45 (05) : 881 - 888
12345