HIGH-ACCURACY DISTANCE MEASUREMENTS WITH MULTIPLE-WAVELENGTH INTERFEROMETRY

被引：1

作者：

DANDLIKER, R

HUG, K

POLITCH, J

ZIMMERMANN, E

机构：

来源：

OPTICAL ENGINEERING | 1995年 / 34卷 / 08期

关键词：

INTERFEROMETRY; MULTIPLE WAVELENGTH; DISTANCE MEASUREMENT; RANGING;

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Multiple-wavelength interferometry is, like classical interferometry, a coherent method, but it offers great flexibility in sensitivity by an appropriate choice of the different wavelengths and it can be operated on rough surfaces. The accuracy of this method depends essentially on the signal processing and on the properties of the source. Practical considerations for distances in the range of several meters with micrometer resolution are given.

引用

页码：2407 / 2412

页数：6