AMORPHOUS-CARBON COATINGS PREPARED BY HIGH-RATE RF PLASMA DEPOSITION FROM FLUORINATED BENZENES

被引:69
作者
SAH, RE
DISCHLER, B
BUBENZER, A
KOIDL, P
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D O I
10.1063/1.95493
中图分类号
O59 [应用物理学];
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页码:739 / 741
页数:3
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