RELATIONSHIPS BETWEEN STRESS, COMPOSITION, AND MICROSTRUCTURE IN SPUTTERED SILICON-NITRIDE

被引：11

作者：

MARTIN, PM ^{[1
]}

EXARHOS, GJ ^{[1
]}

机构：

[1] PACIFIC NW LAB, RICHLAND, WA 99352 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.572963

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：615 / 616

页数：2

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