TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF SPUTTERING

被引：47

作者：

ITO, K

NAKAZAWA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 04期

关键词：

D O I：

10.1143/JJAP.22.L245

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L245 / L247

页数：3

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[1] OPTICAL AND ELECTRICAL-PROPERTIES OF ZNO FILMS PREPARED BY SPRAY PYROLYSIS FOR SOLAR-CELL APPLICATIONS
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[2] HEAT-TREATMENT OF BIAS SPUTTERED ZNO FILMS
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[3] HIGHLY CONDUCTIVE AND TRANSPARENT ZINC-OXIDE FILMS PREPARED BY RF MAGNETRON SPUTTERING UNDER AN APPLIED EXTERNAL MAGNETIC-FIELD
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[J]. APPLIED PHYSICS LETTERS, 1982, 41 (10) : 958 - 960
[4] THE PREPARATION AND SOME PROPERTIES OF TRANSPARENT CONDUCTING ZNO FOR USE IN SOLAR-CELLS
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BRODIE, DE
[J]. CANADIAN JOURNAL OF PHYSICS, 1982, 60 (10) : 1387 - 1390
[5] TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING
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WILLIAMS, DF
BUCHANAN, M
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (08) : 640 - 642