TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF SPUTTERING

被引：47
作者：
ITO, K
NAKAZAWA, T
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 04期
关键词：
D O I：
10.1143/JJAP.22.L245
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：L245 / L247
页数：3
相关论文
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