DIRECT MEASUREMENT OF DIFFUSION AT TEMPERATURES LESS THAN 0.5 TM

被引：36

作者：

GUPTA, D ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

THIN SOLID FILMS | 1975年 / 25卷 / 01期

关键词：

D O I：

10.1016/0040-6090(75)90259-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：231 / 244

页数：14

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