NOVEL PASSIVATION DIELECTRICS - THE BORON-DOPED OR PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS

被引：19
作者：
CHANG, CY
FANG, YK
HUANG, CF
WU, BS
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 02期
关键词：
D O I：
10.1149/1.2113855
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：418 / 422
页数：5
相关论文
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