AMORPHIZATION PROCESSES STUDIED BY HIGH-DOSE ION-IMPLANTATION INTO METALS

被引：0
|
作者：
LINKER, G
SEIDEL, A
STREHLAU, B
机构：
来源：
EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS | 1988年 / 8卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：244 / 246
页数：3
相关论文
共 50 条
  • [41] DISTINCTIVE FEATURES OF BORON DISTRIBUTION IN SILICON UNDER HIGH-DOSE ION-IMPLANTATION DOPING
    GALIEV, GB
    SARAIKIN, VV
    BEGISHEV, AR
    MOKEROV, VG
    SOVIET MICROELECTRONICS, 1986, 15 (04): : 203 - 206
  • [42] CONDUCTIVE LAYER FORMATION BY HIGH-DOSE SI ION-IMPLANTATION INTO SIO2
    MIYAKE, M
    KIUCHI, K
    APPLIED PHYSICS LETTERS, 1985, 46 (09) : 879 - 881
  • [43] SYNTHESIS OF BORIDES, CARBIDES AND NITRIDES IN METAL-SURFACES BY HIGH-DOSE ION-IMPLANTATION
    RAUSCHENBACH, B
    JOURNAL OF THE LESS-COMMON METALS, 1986, 117 (1-2): : 115 - 119
  • [44] THE FORMATION OF SIO2-FILMS ON SILICON BY HIGH-DOSE OXYGEN ION-IMPLANTATION
    KREISSIG, U
    HENSEL, E
    SKORUPA, W
    JOHANSEN, H
    THIN SOLID FILMS, 1982, 98 (03) : 229 - 232
  • [45] FORMATION OF BURIED IRIDIUM SILICIDE LAYER IN SILICON BY HIGH-DOSE IRIDIUM ION-IMPLANTATION
    YU, KM
    KATZ, B
    WU, IC
    BROWN, IG
    ION BEAM PROCESSING OF ADVANCED ELECTRONIC MATERIALS, 1989, 147 : 229 - 234
  • [46] High-dose ion implantation into GaN
    Kucheyev, SO
    Williams, JS
    Zou, J
    Jagadish, C
    Li, G
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2001, 175 : 214 - 218
  • [47] APPLICATIONS OF ION-IMPLANTATION IN METALS
    DEARNALEY, G
    THIN SOLID FILMS, 1983, 107 (03) : 315 - 326
  • [48] AMORPHOUS METALS AND ION-IMPLANTATION
    GRANT, WA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (05): : 1644 - 1649
  • [49] ION-IMPLANTATION INTO METALS AND CARBIDES
    DEARNALEY, G
    HARTLEY, NEW
    THIN SOLID FILMS, 1978, 54 (02) : 215 - 232
  • [50] ONLINE MEASUREMENT OF THE SPATIAL DOSE UNIFORMITY IN ION-IMPLANTATION PROCESSES
    STIEHLER, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 31 (04): : 563 - 566
12345