DISSOCIATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT

被引:153
作者
PERRIN, J
SCHMITT, JPM
DEROSNY, G
DREVILLON, B
HUC, J
LLORET, A
机构
关键词
D O I
10.1016/0301-0104(82)85177-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
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页码:383 / 394
页数:12
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共 37 条
[1]   RADIATION FROM CH4 AND C2H4 PRODUCED BY ELECTRON IMPACT [J].
AARTS, JFM ;
BEENAKKER, CI ;
DEHEER, FJ .
PHYSICA, 1971, 53 (01) :32-+
[2]   PYROLYSIS OF DISILANE AND RATE CONSTANTS OF SILENE INSERTION REACTIONS [J].
BOWREY, M ;
PURNELL, JH .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1971, 321 (1546) :341-&
[3]   MOLECULAR DISSOCIATION BY ELECTRON-IMPACT - OPTICAL EMISSION FROM FRAGMENTS OF METHANE, ETHYLENE, AND METHANOL [J].
DONOHUE, DE ;
SCHIAVONE, JA ;
FREUND, RS .
JOURNAL OF CHEMICAL PHYSICS, 1977, 67 (02) :769-780
[4]   SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE [J].
DREVILLON, B ;
HUC, J ;
LLORET, A ;
PERRIN, J ;
DEROSNY, G ;
SCHMITT, JPM .
APPLIED PHYSICS LETTERS, 1980, 37 (07) :646-648
[5]  
DREVILLON B, 1979, 4TH P INT S PLASM CH, P169
[6]  
DREVILLON B, 1981, 5TH P INT S PLASM CH, P634
[7]   STRUCTURE AND STABILITY OF SIH4+ [J].
GORDON, MS .
CHEMICAL PHYSICS LETTERS, 1978, 59 (03) :410-413
[8]   OXIDATION OF GAAS IN AN OXYGEN MULTIPOLE PLASMA [J].
GOURRIER, S ;
MIRCEA, A ;
BACAL, M .
THIN SOLID FILMS, 1980, 65 (03) :315-330
[9]   The far ultraviolet spectra of methylsilanes [J].
Harada, Y. ;
Murrell, J. N. ;
Sheena, H. H. .
CHEMICAL PHYSICS LETTERS, 1968, 1 (12) :595-596
[10]   SPATIAL PLASMA POTENTIAL VARIATIONS IN A MULTI-DIPOLE DEVICE [J].
HERSHKOWITZ, N ;
SMITH, JR ;
DEKOCK, JR .
PLASMA PHYSICS AND CONTROLLED FUSION, 1979, 21 (09) :823-825