PROPERTIES OF SPUTTERED MOLYBDENUM SILICIDE THIN-FILMS

被引：27

作者：

CHOW, TP

BOWER, DH

VANART, RL

KATZ, W

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 04期

关键词：

D O I：

10.1149/1.2119865

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：952 / 956

页数：5

共 19 条

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